JPS5228370B2 - - Google Patents

Info

Publication number
JPS5228370B2
JPS5228370B2 JP47022252A JP2225272A JPS5228370B2 JP S5228370 B2 JPS5228370 B2 JP S5228370B2 JP 47022252 A JP47022252 A JP 47022252A JP 2225272 A JP2225272 A JP 2225272A JP S5228370 B2 JPS5228370 B2 JP S5228370B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47022252A
Other languages
Japanese (ja)
Other versions
JPS4890738A (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47022252A priority Critical patent/JPS5228370B2/ja
Priority to DE19732309062 priority patent/DE2309062C3/de
Priority to GB903473A priority patent/GB1418169A/en
Publication of JPS4890738A publication Critical patent/JPS4890738A/ja
Priority to US05/594,870 priority patent/US4035189A/en
Publication of JPS5228370B2 publication Critical patent/JPS5228370B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP47022252A 1972-02-25 1972-03-06 Expired JPS5228370B2 (no)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP47022252A JPS5228370B2 (no) 1972-03-06 1972-03-06
DE19732309062 DE2309062C3 (de) 1972-02-25 1973-02-23 Verfahren zur Herstellung von Reliefbildern und dafür brauchbare Gemische und Aufzeichnungsmaterialien
GB903473A GB1418169A (en) 1972-02-25 1973-02-23 Resist image formation process and resin compositions and materials for use in said process
US05/594,870 US4035189A (en) 1972-02-25 1975-07-10 Image forming curable resin compositions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47022252A JPS5228370B2 (no) 1972-03-06 1972-03-06

Publications (2)

Publication Number Publication Date
JPS4890738A JPS4890738A (no) 1973-11-27
JPS5228370B2 true JPS5228370B2 (no) 1977-07-26

Family

ID=12077582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47022252A Expired JPS5228370B2 (no) 1972-02-25 1972-03-06

Country Status (1)

Country Link
JP (1) JPS5228370B2 (no)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61208050A (ja) * 1985-03-12 1986-09-16 Daicel Chem Ind Ltd 導電性フイルムのパタ−ン形成法
JP2848625B2 (ja) * 1989-03-31 1999-01-20 株式会社東芝 パターン形成方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3469982A (en) * 1968-09-11 1969-09-30 Jack Richard Celeste Process for making photoresists
US3622334A (en) * 1969-12-31 1971-11-23 Du Pont Photopolymerizable compositions and elements containing heterocyclic nitrogen-containing compounds
JPS4887904A (no) * 1972-02-03 1973-11-19

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3469982A (en) * 1968-09-11 1969-09-30 Jack Richard Celeste Process for making photoresists
US3622334A (en) * 1969-12-31 1971-11-23 Du Pont Photopolymerizable compositions and elements containing heterocyclic nitrogen-containing compounds
JPS4887904A (no) * 1972-02-03 1973-11-19

Also Published As

Publication number Publication date
JPS4890738A (no) 1973-11-27

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