JPS5228347A - Position detector unit - Google Patents
Position detector unitInfo
- Publication number
- JPS5228347A JPS5228347A JP10411475A JP10411475A JPS5228347A JP S5228347 A JPS5228347 A JP S5228347A JP 10411475 A JP10411475 A JP 10411475A JP 10411475 A JP10411475 A JP 10411475A JP S5228347 A JPS5228347 A JP S5228347A
- Authority
- JP
- Japan
- Prior art keywords
- position detector
- detector unit
- rotary
- endocer
- irregular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Transform (AREA)
- Electronic Switches (AREA)
Abstract
PURPOSE: Detection of the displacement from the reference point with the pulse number by connecting the rotary endocer of the transducer directly with the rotary prism to protect the accuracy from the irregular rotative velocity of the drive motor.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10411475A JPS5228347A (en) | 1975-08-29 | 1975-08-29 | Position detector unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10411475A JPS5228347A (en) | 1975-08-29 | 1975-08-29 | Position detector unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5228347A true JPS5228347A (en) | 1977-03-03 |
Family
ID=14372087
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10411475A Pending JPS5228347A (en) | 1975-08-29 | 1975-08-29 | Position detector unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5228347A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3039543A1 (en) * | 1979-10-22 | 1981-09-10 | Shin-Etsu Chemical Co., Ltd., Tokyo | METHOD FOR PRODUCING PVC RESINS |
US4380395A (en) * | 1979-06-04 | 1983-04-19 | Hitachi, Ltd. | Reduction projection aligner system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5011061A (en) * | 1973-05-11 | 1975-02-04 | ||
JPS5025260A (en) * | 1973-06-15 | 1975-03-17 |
-
1975
- 1975-08-29 JP JP10411475A patent/JPS5228347A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5011061A (en) * | 1973-05-11 | 1975-02-04 | ||
JPS5025260A (en) * | 1973-06-15 | 1975-03-17 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4380395A (en) * | 1979-06-04 | 1983-04-19 | Hitachi, Ltd. | Reduction projection aligner system |
DE3039543A1 (en) * | 1979-10-22 | 1981-09-10 | Shin-Etsu Chemical Co., Ltd., Tokyo | METHOD FOR PRODUCING PVC RESINS |
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