JPS5227878Y2 - - Google Patents

Info

Publication number
JPS5227878Y2
JPS5227878Y2 JP526272U JP526272U JPS5227878Y2 JP S5227878 Y2 JPS5227878 Y2 JP S5227878Y2 JP 526272 U JP526272 U JP 526272U JP 526272 U JP526272 U JP 526272U JP S5227878 Y2 JPS5227878 Y2 JP S5227878Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP526272U
Other languages
Japanese (ja)
Other versions
JPS4881149U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP526272U priority Critical patent/JPS5227878Y2/ja
Publication of JPS4881149U publication Critical patent/JPS4881149U/ja
Application granted granted Critical
Publication of JPS5227878Y2 publication Critical patent/JPS5227878Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP526272U 1972-01-08 1972-01-08 Expired JPS5227878Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP526272U JPS5227878Y2 (en:Method) 1972-01-08 1972-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP526272U JPS5227878Y2 (en:Method) 1972-01-08 1972-01-08

Publications (2)

Publication Number Publication Date
JPS4881149U JPS4881149U (en:Method) 1973-10-04
JPS5227878Y2 true JPS5227878Y2 (en:Method) 1977-06-24

Family

ID=27845979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP526272U Expired JPS5227878Y2 (en:Method) 1972-01-08 1972-01-08

Country Status (1)

Country Link
JP (1) JPS5227878Y2 (en:Method)

Also Published As

Publication number Publication date
JPS4881149U (en:Method) 1973-10-04

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