JPS5227878Y2 - - Google Patents

Info

Publication number
JPS5227878Y2
JPS5227878Y2 JP526272U JP526272U JPS5227878Y2 JP S5227878 Y2 JPS5227878 Y2 JP S5227878Y2 JP 526272 U JP526272 U JP 526272U JP 526272 U JP526272 U JP 526272U JP S5227878 Y2 JPS5227878 Y2 JP S5227878Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP526272U
Other languages
Japanese (ja)
Other versions
JPS4881149U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP526272U priority Critical patent/JPS5227878Y2/ja
Publication of JPS4881149U publication Critical patent/JPS4881149U/ja
Application granted granted Critical
Publication of JPS5227878Y2 publication Critical patent/JPS5227878Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP526272U 1972-01-08 1972-01-08 Expired JPS5227878Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP526272U JPS5227878Y2 (en, 2012) 1972-01-08 1972-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP526272U JPS5227878Y2 (en, 2012) 1972-01-08 1972-01-08

Publications (2)

Publication Number Publication Date
JPS4881149U JPS4881149U (en, 2012) 1973-10-04
JPS5227878Y2 true JPS5227878Y2 (en, 2012) 1977-06-24

Family

ID=27845979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP526272U Expired JPS5227878Y2 (en, 2012) 1972-01-08 1972-01-08

Country Status (1)

Country Link
JP (1) JPS5227878Y2 (en, 2012)

Also Published As

Publication number Publication date
JPS4881149U (en, 2012) 1973-10-04

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