JPS5227780U - - Google Patents
Info
- Publication number
- JPS5227780U JPS5227780U JP11315775U JP11315775U JPS5227780U JP S5227780 U JPS5227780 U JP S5227780U JP 11315775 U JP11315775 U JP 11315775U JP 11315775 U JP11315775 U JP 11315775U JP S5227780 U JPS5227780 U JP S5227780U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11315775U JPS5227780U (en:Method) | 1975-08-15 | 1975-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11315775U JPS5227780U (en:Method) | 1975-08-15 | 1975-08-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5227780U true JPS5227780U (en:Method) | 1977-02-26 |
Family
ID=28594257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11315775U Pending JPS5227780U (en:Method) | 1975-08-15 | 1975-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5227780U (en:Method) |
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1975
- 1975-08-15 JP JP11315775U patent/JPS5227780U/ja active Pending