JPS5227245U - - Google Patents
Info
- Publication number
- JPS5227245U JPS5227245U JP11455075U JP11455075U JPS5227245U JP S5227245 U JPS5227245 U JP S5227245U JP 11455075 U JP11455075 U JP 11455075U JP 11455075 U JP11455075 U JP 11455075U JP S5227245 U JPS5227245 U JP S5227245U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Phase Differences (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11455075U JPS574558Y2 (en:Method) | 1975-08-19 | 1975-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11455075U JPS574558Y2 (en:Method) | 1975-08-19 | 1975-08-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5227245U true JPS5227245U (en:Method) | 1977-02-25 |
| JPS574558Y2 JPS574558Y2 (en:Method) | 1982-01-27 |
Family
ID=28595582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11455075U Expired JPS574558Y2 (en:Method) | 1975-08-19 | 1975-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS574558Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230123443A (ko) | 2022-02-16 | 2023-08-23 | 도쿄엘렉트론가부시키가이샤 | 플라스마 처리 장치 |
-
1975
- 1975-08-19 JP JP11455075U patent/JPS574558Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230123443A (ko) | 2022-02-16 | 2023-08-23 | 도쿄엘렉트론가부시키가이샤 | 플라스마 처리 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS574558Y2 (en:Method) | 1982-01-27 |