JPS5227028A - Etching device - Google Patents

Etching device

Info

Publication number
JPS5227028A
JPS5227028A JP10372775A JP10372775A JPS5227028A JP S5227028 A JPS5227028 A JP S5227028A JP 10372775 A JP10372775 A JP 10372775A JP 10372775 A JP10372775 A JP 10372775A JP S5227028 A JPS5227028 A JP S5227028A
Authority
JP
Japan
Prior art keywords
etching device
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10372775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5430651B2 (OSRAM
Inventor
Minoru Nemoto
Kadode Okumura
Kouji Oooka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10372775A priority Critical patent/JPS5227028A/ja
Publication of JPS5227028A publication Critical patent/JPS5227028A/ja
Publication of JPS5430651B2 publication Critical patent/JPS5430651B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP10372775A 1975-08-27 1975-08-27 Etching device Granted JPS5227028A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10372775A JPS5227028A (en) 1975-08-27 1975-08-27 Etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10372775A JPS5227028A (en) 1975-08-27 1975-08-27 Etching device

Publications (2)

Publication Number Publication Date
JPS5227028A true JPS5227028A (en) 1977-03-01
JPS5430651B2 JPS5430651B2 (OSRAM) 1979-10-02

Family

ID=14361678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10372775A Granted JPS5227028A (en) 1975-08-27 1975-08-27 Etching device

Country Status (1)

Country Link
JP (1) JPS5227028A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4362595A (en) * 1980-05-19 1982-12-07 The Boeing Company Screen fabrication by hand chemical blanking

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4362595A (en) * 1980-05-19 1982-12-07 The Boeing Company Screen fabrication by hand chemical blanking

Also Published As

Publication number Publication date
JPS5430651B2 (OSRAM) 1979-10-02

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