JPS522697Y2 - - Google Patents
Info
- Publication number
- JPS522697Y2 JPS522697Y2 JP1974088293U JP8829374U JPS522697Y2 JP S522697 Y2 JPS522697 Y2 JP S522697Y2 JP 1974088293 U JP1974088293 U JP 1974088293U JP 8829374 U JP8829374 U JP 8829374U JP S522697 Y2 JPS522697 Y2 JP S522697Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974088293U JPS522697Y2 (https=) | 1974-07-26 | 1974-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974088293U JPS522697Y2 (https=) | 1974-07-26 | 1974-07-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5118779U JPS5118779U (https=) | 1976-02-10 |
| JPS522697Y2 true JPS522697Y2 (https=) | 1977-01-21 |
Family
ID=28273111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974088293U Expired JPS522697Y2 (https=) | 1974-07-26 | 1974-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS522697Y2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58195233U (ja) * | 1982-06-21 | 1983-12-26 | 株式会社リコー | ミラ−調整装置 |
| JPS60143446U (ja) * | 1984-03-05 | 1985-09-24 | キヤノン株式会社 | 反射鏡を含む光学系 |
| JPS62109161U (https=) * | 1985-12-25 | 1987-07-11 | ||
| JP2694270B2 (ja) * | 1987-10-30 | 1997-12-24 | 三田工業株式会社 | 光学系移動式露光装置におけるミラー |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4737184U (https=) * | 1971-05-15 | 1972-12-25 | ||
| JPS5226133Y2 (https=) * | 1972-11-13 | 1977-06-14 |
-
1974
- 1974-07-26 JP JP1974088293U patent/JPS522697Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5118779U (https=) | 1976-02-10 |