JPS5226849A - Device for accurately comparing two articles optically in plane range - Google Patents

Device for accurately comparing two articles optically in plane range

Info

Publication number
JPS5226849A
JPS5226849A JP51098561A JP9856176A JPS5226849A JP S5226849 A JPS5226849 A JP S5226849A JP 51098561 A JP51098561 A JP 51098561A JP 9856176 A JP9856176 A JP 9856176A JP S5226849 A JPS5226849 A JP S5226849A
Authority
JP
Japan
Prior art keywords
optically
articles
plane range
accurately comparing
comparing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51098561A
Other languages
English (en)
Inventor
Riitaru Kurisuchian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JPS5226849A publication Critical patent/JPS5226849A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP51098561A 1975-08-21 1976-08-18 Device for accurately comparing two articles optically in plane range Pending JPS5226849A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752537153 DE2537153A1 (de) 1975-08-21 1975-08-21 Vorrichtung zum vergleich zweier gegenstaende

Publications (1)

Publication Number Publication Date
JPS5226849A true JPS5226849A (en) 1977-02-28

Family

ID=5954454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51098561A Pending JPS5226849A (en) 1975-08-21 1976-08-18 Device for accurately comparing two articles optically in plane range

Country Status (6)

Country Link
US (1) US4040746A (ja)
JP (1) JPS5226849A (ja)
DE (1) DE2537153A1 (ja)
FR (1) FR2321683A1 (ja)
GB (1) GB1559501A (ja)
NL (1) NL7609278A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3225353C1 (de) * 1982-06-29 1983-10-20 C. Reichert Optische Werke AG, 1170 Wien Zeichenapparat oder Makrophotoeinrichtung fuer ein gestuerztes Mikroskop
GB2140578B (en) * 1983-05-26 1986-04-23 Vickers Plc Optical microscope having adjustable optics to view two specimens
JPS60119407A (ja) * 1983-11-30 1985-06-26 Nippon Kogaku Kk <Nikon> 比較検査装置
DE3577355D1 (de) * 1984-06-25 1990-05-31 Olympus Optical Co Mikroskop.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR776761A (fr) * 1933-08-04 1935-02-04 Zeiss Carl Microscope dans lequel les rayons qui forment l'image ont un parcours brisé
US2950649A (en) * 1955-08-02 1960-08-30 Leitz Ernst Gmbh Interference microscope with transmitted illumination
US3442583A (en) * 1966-12-19 1969-05-06 Ibm Mask alignment system using coherent fiber bundle
US3667848A (en) * 1970-02-02 1972-06-06 Ncr Co Semiconductor chip bonding method
US3752589A (en) * 1971-10-26 1973-08-14 M Kobayashi Method and apparatus for positioning patterns of a photographic mask on the surface of a wafer on the basis of backside patterns of the wafer

Also Published As

Publication number Publication date
GB1559501A (en) 1980-01-23
NL7609278A (nl) 1977-02-23
FR2321683A1 (fr) 1977-03-18
FR2321683B1 (ja) 1982-04-09
US4040746A (en) 1977-08-09
DE2537153A1 (de) 1977-03-03

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