JPS5226259A - Ion pump current flow detection device - Google Patents
Ion pump current flow detection deviceInfo
- Publication number
- JPS5226259A JPS5226259A JP10245875A JP10245875A JPS5226259A JP S5226259 A JPS5226259 A JP S5226259A JP 10245875 A JP10245875 A JP 10245875A JP 10245875 A JP10245875 A JP 10245875A JP S5226259 A JPS5226259 A JP S5226259A
- Authority
- JP
- Japan
- Prior art keywords
- ion pump
- current flow
- detection device
- flow detection
- pump current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To detect and display the degree of vacuum by means of the current flow of an ion pump, and also to facilitate automatic functoning of the elements of the system in which the ion pump is operating.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10245875A JPS5226259A (en) | 1975-08-23 | 1975-08-23 | Ion pump current flow detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10245875A JPS5226259A (en) | 1975-08-23 | 1975-08-23 | Ion pump current flow detection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5226259A true JPS5226259A (en) | 1977-02-26 |
Family
ID=14328010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10245875A Pending JPS5226259A (en) | 1975-08-23 | 1975-08-23 | Ion pump current flow detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226259A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02112470A (en) * | 1988-10-20 | 1990-04-25 | Shikishima Kanbasu Kk | Method for reinforcing industrial fabric and selvage part thereof |
JP2009128276A (en) * | 2007-11-27 | 2009-06-11 | Shinku Jikkenshitsu:Kk | Ionization vacuum device |
-
1975
- 1975-08-23 JP JP10245875A patent/JPS5226259A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02112470A (en) * | 1988-10-20 | 1990-04-25 | Shikishima Kanbasu Kk | Method for reinforcing industrial fabric and selvage part thereof |
JP2009128276A (en) * | 2007-11-27 | 2009-06-11 | Shinku Jikkenshitsu:Kk | Ionization vacuum device |
US8350572B2 (en) | 2007-11-27 | 2013-01-08 | Ampere Inc. | Ionization vacuum device |
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