JPS5226259A - Ion pump current flow detection device - Google Patents

Ion pump current flow detection device

Info

Publication number
JPS5226259A
JPS5226259A JP10245875A JP10245875A JPS5226259A JP S5226259 A JPS5226259 A JP S5226259A JP 10245875 A JP10245875 A JP 10245875A JP 10245875 A JP10245875 A JP 10245875A JP S5226259 A JPS5226259 A JP S5226259A
Authority
JP
Japan
Prior art keywords
ion pump
current flow
detection device
flow detection
pump current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10245875A
Other languages
Japanese (ja)
Inventor
Toshiaki Nakada
Masahide Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10245875A priority Critical patent/JPS5226259A/en
Publication of JPS5226259A publication Critical patent/JPS5226259A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To detect and display the degree of vacuum by means of the current flow of an ion pump, and also to facilitate automatic functoning of the elements of the system in which the ion pump is operating.
COPYRIGHT: (C)1977,JPO&Japio
JP10245875A 1975-08-23 1975-08-23 Ion pump current flow detection device Pending JPS5226259A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10245875A JPS5226259A (en) 1975-08-23 1975-08-23 Ion pump current flow detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10245875A JPS5226259A (en) 1975-08-23 1975-08-23 Ion pump current flow detection device

Publications (1)

Publication Number Publication Date
JPS5226259A true JPS5226259A (en) 1977-02-26

Family

ID=14328010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10245875A Pending JPS5226259A (en) 1975-08-23 1975-08-23 Ion pump current flow detection device

Country Status (1)

Country Link
JP (1) JPS5226259A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02112470A (en) * 1988-10-20 1990-04-25 Shikishima Kanbasu Kk Method for reinforcing industrial fabric and selvage part thereof
JP2009128276A (en) * 2007-11-27 2009-06-11 Shinku Jikkenshitsu:Kk Ionization vacuum device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02112470A (en) * 1988-10-20 1990-04-25 Shikishima Kanbasu Kk Method for reinforcing industrial fabric and selvage part thereof
JP2009128276A (en) * 2007-11-27 2009-06-11 Shinku Jikkenshitsu:Kk Ionization vacuum device
US8350572B2 (en) 2007-11-27 2013-01-08 Ampere Inc. Ionization vacuum device

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