JPS5225562A - Multi-electrode unit - Google Patents

Multi-electrode unit

Info

Publication number
JPS5225562A
JPS5225562A JP10064675A JP10064675A JPS5225562A JP S5225562 A JPS5225562 A JP S5225562A JP 10064675 A JP10064675 A JP 10064675A JP 10064675 A JP10064675 A JP 10064675A JP S5225562 A JPS5225562 A JP S5225562A
Authority
JP
Japan
Prior art keywords
electrode unit
yoke
cross
magnetic fields
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10064675A
Other languages
Japanese (ja)
Other versions
JPS5826616B2 (en
Inventor
Hidetsugu Ikegami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Ikegami Hidetsugu
Original Assignee
Sumitomo Heavy Industries Ltd
Ikegami Hidetsugu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd, Ikegami Hidetsugu filed Critical Sumitomo Heavy Industries Ltd
Priority to JP10064675A priority Critical patent/JPS5826616B2/en
Publication of JPS5225562A publication Critical patent/JPS5225562A/en
Publication of JPS5826616B2 publication Critical patent/JPS5826616B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To optionally generate single or plural numbers of multi-electrode magnetic fields on a single yoke by means of placing coils on each side of the yoke of which cross section is polygon shape.
COPYRIGHT: (C)1977,JPO&Japio
JP10064675A 1975-08-21 1975-08-21 Takiyokujiba Souchi Expired JPS5826616B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10064675A JPS5826616B2 (en) 1975-08-21 1975-08-21 Takiyokujiba Souchi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10064675A JPS5826616B2 (en) 1975-08-21 1975-08-21 Takiyokujiba Souchi

Publications (2)

Publication Number Publication Date
JPS5225562A true JPS5225562A (en) 1977-02-25
JPS5826616B2 JPS5826616B2 (en) 1983-06-03

Family

ID=14279578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10064675A Expired JPS5826616B2 (en) 1975-08-21 1975-08-21 Takiyokujiba Souchi

Country Status (1)

Country Link
JP (1) JPS5826616B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795U (en) * 1980-05-30 1982-01-05
JPS578400U (en) * 1980-06-13 1982-01-16
JPS58148299U (en) * 1982-03-31 1983-10-05 本田技研工業株式会社 Radial type compressor wheel
US6139298A (en) * 1998-07-08 2000-10-31 Hokuetsu Industries Co., Ltd. Shaft structure in screw rotor of screw fluid assembly
JP2012508957A (en) * 2008-11-13 2012-04-12 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド Mass spectrometry magnet for ribbon beam
CN108807119A (en) * 2017-04-27 2018-11-13 伊玛曲公司 Compact deflecting magnet
JP2019212614A (en) * 2018-06-07 2019-12-12 株式会社ニューフレアテクノロジー Deflector for multiple electron beams and multiple-beam image acquiring apparatus
US11585348B2 (en) 2019-03-14 2023-02-21 Mitsubishi Heavy Industries Engine & Turbocharger, Ltd. Compressor wheel device and supercharger
WO2023105632A1 (en) * 2021-12-07 2023-06-15 株式会社日立ハイテク Multipole lens and charged particle beam device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187816U (en) * 1983-05-31 1984-12-13 株式会社　アマダ 2-phase input direction discrimination device
JPS6118818A (en) * 1984-07-06 1986-01-27 Sanyo Electric Co Ltd Rotary encoder apparatus
JPH0518779A (en) * 1991-07-10 1993-01-26 Yaskawa Electric Corp Position reading error detecting method by encoder

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795U (en) * 1980-05-30 1982-01-05
JPS578400U (en) * 1980-06-13 1982-01-16
JPS58148299U (en) * 1982-03-31 1983-10-05 本田技研工業株式会社 Radial type compressor wheel
US6139298A (en) * 1998-07-08 2000-10-31 Hokuetsu Industries Co., Ltd. Shaft structure in screw rotor of screw fluid assembly
US6186756B1 (en) 1998-07-08 2001-02-13 Hokuetsu Industries Co., Ltd. Shaft structure in screw rotor of screw fluid assembly
JP2012508957A (en) * 2008-11-13 2012-04-12 ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド Mass spectrometry magnet for ribbon beam
CN108807119A (en) * 2017-04-27 2018-11-13 伊玛曲公司 Compact deflecting magnet
JP2018190709A (en) * 2017-04-27 2018-11-29 アイマトレックス，インコーポレイテッド Compact deflecting magnet
US10290463B2 (en) 2017-04-27 2019-05-14 Imatrex, Inc. Compact deflecting magnet
US10332718B1 (en) 2017-04-27 2019-06-25 Imatrex, Inc. Compact deflecting magnet
JP2019149387A (en) * 2017-04-27 2019-09-05 アイマトレックス，インコーポレイテッド Compact deflecting magnet
CN108807119B (en) * 2017-04-27 2022-01-21 伊玛曲公司 Compact bias magnet
JP2019212614A (en) * 2018-06-07 2019-12-12 株式会社ニューフレアテクノロジー Deflector for multiple electron beams and multiple-beam image acquiring apparatus
US11585348B2 (en) 2019-03-14 2023-02-21 Mitsubishi Heavy Industries Engine & Turbocharger, Ltd. Compressor wheel device and supercharger
WO2023105632A1 (en) * 2021-12-07 2023-06-15 株式会社日立ハイテク Multipole lens and charged particle beam device

Also Published As

Publication number Publication date
JPS5826616B2 (en) 1983-06-03

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