JPS5225327B2 - - Google Patents
Info
- Publication number
- JPS5225327B2 JPS5225327B2 JP48104536A JP10453673A JPS5225327B2 JP S5225327 B2 JPS5225327 B2 JP S5225327B2 JP 48104536 A JP48104536 A JP 48104536A JP 10453673 A JP10453673 A JP 10453673A JP S5225327 B2 JPS5225327 B2 JP S5225327B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Adhesives Or Adhesive Processes (AREA)
- Physical Vapour Deposition (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48104536A JPS5225327B2 (fr) | 1973-09-18 | 1973-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48104536A JPS5225327B2 (fr) | 1973-09-18 | 1973-09-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5057214A JPS5057214A (fr) | 1975-05-19 |
| JPS5225327B2 true JPS5225327B2 (fr) | 1977-07-07 |
Family
ID=14383200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48104536A Expired JPS5225327B2 (fr) | 1973-09-18 | 1973-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5225327B2 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4612275A (en) * | 1985-04-26 | 1986-09-16 | International Business Machines Corporation | Multilayer resists with improved sensitivity and reduced proximity effect |
| JPH0765154B2 (ja) * | 1985-09-02 | 1995-07-12 | ポリプラスチックス株式会社 | 表面金属処理した樹脂成形品 |
-
1973
- 1973-09-18 JP JP48104536A patent/JPS5225327B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5057214A (fr) | 1975-05-19 |