JPS5225276B2 - - Google Patents

Info

Publication number
JPS5225276B2
JPS5225276B2 JP47106647A JP10664772A JPS5225276B2 JP S5225276 B2 JPS5225276 B2 JP S5225276B2 JP 47106647 A JP47106647 A JP 47106647A JP 10664772 A JP10664772 A JP 10664772A JP S5225276 B2 JPS5225276 B2 JP S5225276B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47106647A
Other languages
Japanese (ja)
Other versions
JPS4966188A (ru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47106647A priority Critical patent/JPS5225276B2/ja
Publication of JPS4966188A publication Critical patent/JPS4966188A/ja
Publication of JPS5225276B2 publication Critical patent/JPS5225276B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP47106647A 1972-10-26 1972-10-26 Expired JPS5225276B2 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47106647A JPS5225276B2 (ru) 1972-10-26 1972-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47106647A JPS5225276B2 (ru) 1972-10-26 1972-10-26

Publications (2)

Publication Number Publication Date
JPS4966188A JPS4966188A (ru) 1974-06-26
JPS5225276B2 true JPS5225276B2 (ru) 1977-07-06

Family

ID=14438895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47106647A Expired JPS5225276B2 (ru) 1972-10-26 1972-10-26

Country Status (1)

Country Link
JP (1) JPS5225276B2 (ru)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2545209B2 (ja) * 1985-11-20 1996-10-16 ラトック・システム・エンジニアリング 株式会社 結晶欠陥検査方法及びその検査装置

Also Published As

Publication number Publication date
JPS4966188A (ru) 1974-06-26

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