JPS5225276B2 - - Google Patents
Info
- Publication number
- JPS5225276B2 JPS5225276B2 JP47106647A JP10664772A JPS5225276B2 JP S5225276 B2 JPS5225276 B2 JP S5225276B2 JP 47106647 A JP47106647 A JP 47106647A JP 10664772 A JP10664772 A JP 10664772A JP S5225276 B2 JPS5225276 B2 JP S5225276B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47106647A JPS5225276B2 (en) | 1972-10-26 | 1972-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47106647A JPS5225276B2 (en) | 1972-10-26 | 1972-10-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4966188A JPS4966188A (en) | 1974-06-26 |
| JPS5225276B2 true JPS5225276B2 (en) | 1977-07-06 |
Family
ID=14438895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47106647A Expired JPS5225276B2 (en) | 1972-10-26 | 1972-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5225276B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2545209B2 (en) * | 1985-11-20 | 1996-10-16 | ラトック・システム・エンジニアリング 株式会社 | Crystal defect inspection method and inspection apparatus therefor |
-
1972
- 1972-10-26 JP JP47106647A patent/JPS5225276B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4966188A (en) | 1974-06-26 |