JPS5225081B2 - - Google Patents
Info
- Publication number
- JPS5225081B2 JPS5225081B2 JP47073937A JP7393772A JPS5225081B2 JP S5225081 B2 JPS5225081 B2 JP S5225081B2 JP 47073937 A JP47073937 A JP 47073937A JP 7393772 A JP7393772 A JP 7393772A JP S5225081 B2 JPS5225081 B2 JP S5225081B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47073937A JPS5225081B2 (en) | 1972-07-24 | 1972-07-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47073937A JPS5225081B2 (en) | 1972-07-24 | 1972-07-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4933610A JPS4933610A (en) | 1974-03-28 |
JPS5225081B2 true JPS5225081B2 (en) | 1977-07-05 |
Family
ID=13532516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP47073937A Expired JPS5225081B2 (en) | 1972-07-24 | 1972-07-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5225081B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160118968A (en) * | 2015-04-03 | 2016-10-12 | 램 리써치 코포레이션 | Deposition of conformal films by ald and atomic layer etch |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285056U (en) * | 1975-12-20 | 1977-06-24 |
-
1972
- 1972-07-24 JP JP47073937A patent/JPS5225081B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160118968A (en) * | 2015-04-03 | 2016-10-12 | 램 리써치 코포레이션 | Deposition of conformal films by ald and atomic layer etch |
Also Published As
Publication number | Publication date |
---|---|
JPS4933610A (en) | 1974-03-28 |