JPS5224464A - Method of selectively diffusing impurities in silicon substrate - Google Patents

Method of selectively diffusing impurities in silicon substrate

Info

Publication number
JPS5224464A
JPS5224464A JP9617076A JP9617076A JPS5224464A JP S5224464 A JPS5224464 A JP S5224464A JP 9617076 A JP9617076 A JP 9617076A JP 9617076 A JP9617076 A JP 9617076A JP S5224464 A JPS5224464 A JP S5224464A
Authority
JP
Japan
Prior art keywords
silicon substrate
diffusing impurities
selectively diffusing
selectively
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9617076A
Other languages
Japanese (ja)
Inventor
Enu Goshiyutagoa Rashindora
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of JPS5224464A publication Critical patent/JPS5224464A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP9617076A 1975-08-15 1976-08-13 Method of selectively diffusing impurities in silicon substrate Pending JPS5224464A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60513875A 1975-08-15 1975-08-15

Publications (1)

Publication Number Publication Date
JPS5224464A true JPS5224464A (en) 1977-02-23

Family

ID=24422424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9617076A Pending JPS5224464A (en) 1975-08-15 1976-08-13 Method of selectively diffusing impurities in silicon substrate

Country Status (1)

Country Link
JP (1) JPS5224464A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492427A (en) * 1972-04-18 1974-01-10
JPS492509A (en) * 1972-03-13 1974-01-10
JPS492512A (en) * 1972-04-19 1974-01-10

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492509A (en) * 1972-03-13 1974-01-10
JPS492427A (en) * 1972-04-18 1974-01-10
JPS492512A (en) * 1972-04-19 1974-01-10

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