JPS5223960A - Process for measuring piezo-electric thickness resonator - Google Patents
Process for measuring piezo-electric thickness resonatorInfo
- Publication number
- JPS5223960A JPS5223960A JP50100843A JP10084375A JPS5223960A JP S5223960 A JPS5223960 A JP S5223960A JP 50100843 A JP50100843 A JP 50100843A JP 10084375 A JP10084375 A JP 10084375A JP S5223960 A JPS5223960 A JP S5223960A
- Authority
- JP
- Japan
- Prior art keywords
- piezo
- resonator
- electric thickness
- electric
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE: To accurately measure a thickness of a piezo-electric plate of a high quality piezo-electric thickness resonator and to simply and exactly detect a resonace response caused by thickness oscillation.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50100843A JPS5223960A (en) | 1975-08-19 | 1975-08-19 | Process for measuring piezo-electric thickness resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50100843A JPS5223960A (en) | 1975-08-19 | 1975-08-19 | Process for measuring piezo-electric thickness resonator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5223960A true JPS5223960A (en) | 1977-02-23 |
JPS5746010B2 JPS5746010B2 (en) | 1982-09-30 |
Family
ID=14284590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50100843A Granted JPS5223960A (en) | 1975-08-19 | 1975-08-19 | Process for measuring piezo-electric thickness resonator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5223960A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105910530A (en) * | 2016-04-26 | 2016-08-31 | 中国电子科技集团公司第二十六研究所 | Wafer parallelism testing method |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60188618U (en) * | 1984-05-28 | 1985-12-13 | 井上エムテ−ピ−株式会社 | automotive duct |
CN105675120A (en) * | 2016-04-26 | 2016-06-15 | 中国电子科技集团公司第二十六研究所 | Wafer frequency test device |
-
1975
- 1975-08-19 JP JP50100843A patent/JPS5223960A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105910530A (en) * | 2016-04-26 | 2016-08-31 | 中国电子科技集团公司第二十六研究所 | Wafer parallelism testing method |
Also Published As
Publication number | Publication date |
---|---|
JPS5746010B2 (en) | 1982-09-30 |
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