JPS5223960A - Process for measuring piezo-electric thickness resonator - Google Patents

Process for measuring piezo-electric thickness resonator

Info

Publication number
JPS5223960A
JPS5223960A JP50100843A JP10084375A JPS5223960A JP S5223960 A JPS5223960 A JP S5223960A JP 50100843 A JP50100843 A JP 50100843A JP 10084375 A JP10084375 A JP 10084375A JP S5223960 A JPS5223960 A JP S5223960A
Authority
JP
Japan
Prior art keywords
piezo
resonator
electric thickness
electric
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50100843A
Other languages
Japanese (ja)
Other versions
JPS5746010B2 (en
Inventor
Takashi Nagata
Yasuo Nakajima
Kiyokazu Hagiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50100843A priority Critical patent/JPS5223960A/en
Publication of JPS5223960A publication Critical patent/JPS5223960A/en
Publication of JPS5746010B2 publication Critical patent/JPS5746010B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE: To accurately measure a thickness of a piezo-electric plate of a high quality piezo-electric thickness resonator and to simply and exactly detect a resonace response caused by thickness oscillation.
COPYRIGHT: (C)1977,JPO&Japio
JP50100843A 1975-08-19 1975-08-19 Process for measuring piezo-electric thickness resonator Granted JPS5223960A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50100843A JPS5223960A (en) 1975-08-19 1975-08-19 Process for measuring piezo-electric thickness resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50100843A JPS5223960A (en) 1975-08-19 1975-08-19 Process for measuring piezo-electric thickness resonator

Publications (2)

Publication Number Publication Date
JPS5223960A true JPS5223960A (en) 1977-02-23
JPS5746010B2 JPS5746010B2 (en) 1982-09-30

Family

ID=14284590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50100843A Granted JPS5223960A (en) 1975-08-19 1975-08-19 Process for measuring piezo-electric thickness resonator

Country Status (1)

Country Link
JP (1) JPS5223960A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910530A (en) * 2016-04-26 2016-08-31 中国电子科技集团公司第二十六研究所 Wafer parallelism testing method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60188618U (en) * 1984-05-28 1985-12-13 井上エムテ−ピ−株式会社 automotive duct
CN105675120A (en) * 2016-04-26 2016-06-15 中国电子科技集团公司第二十六研究所 Wafer frequency test device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910530A (en) * 2016-04-26 2016-08-31 中国电子科技集团公司第二十六研究所 Wafer parallelism testing method

Also Published As

Publication number Publication date
JPS5746010B2 (en) 1982-09-30

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