JPS5223743A - Spiral waveguide - Google Patents

Spiral waveguide

Info

Publication number
JPS5223743A
JPS5223743A JP9914675A JP9914675A JPS5223743A JP S5223743 A JPS5223743 A JP S5223743A JP 9914675 A JP9914675 A JP 9914675A JP 9914675 A JP9914675 A JP 9914675A JP S5223743 A JPS5223743 A JP S5223743A
Authority
JP
Japan
Prior art keywords
spiral waveguide
waveguide
spiral
outer circumference
circumference part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9914675A
Other languages
Japanese (ja)
Inventor
Hiroshi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP9914675A priority Critical patent/JPS5223743A/en
Publication of JPS5223743A publication Critical patent/JPS5223743A/en
Pending legal-status Critical Current

Links

Landscapes

  • Constitution Of High-Frequency Heating (AREA)
  • Waveguides (AREA)

Abstract

PURPOSE: A waveguide to heat spiral outer circumference part.
COPYRIGHT: (C)1977,JPO&Japio
JP9914675A 1975-08-14 1975-08-14 Spiral waveguide Pending JPS5223743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9914675A JPS5223743A (en) 1975-08-14 1975-08-14 Spiral waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9914675A JPS5223743A (en) 1975-08-14 1975-08-14 Spiral waveguide

Publications (1)

Publication Number Publication Date
JPS5223743A true JPS5223743A (en) 1977-02-22

Family

ID=14239545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9914675A Pending JPS5223743A (en) 1975-08-14 1975-08-14 Spiral waveguide

Country Status (1)

Country Link
JP (1) JPS5223743A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593043A (en) * 1979-01-04 1980-07-15 Redland Automation Ltd Fluid variables measuring device
WO2006080130A1 (en) * 2005-01-31 2006-08-03 Murata Manufacturing Co., Ltd. Waveguide horn antenna, antenna device, and radar device
JP2013509564A (en) * 2009-11-02 2013-03-14 ベ パク，ヨン Composite plasma generator
JP2018507508A (en) * 2015-01-07 2018-03-15 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Workpiece processing chamber having a rotating microplasma antenna with a slotted helical waveguide

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593043A (en) * 1979-01-04 1980-07-15 Redland Automation Ltd Fluid variables measuring device
JPS6217692B2 (en) * 1979-01-04 1987-04-18 Sarasota Ootomeeshon Ltd
WO2006080130A1 (en) * 2005-01-31 2006-08-03 Murata Manufacturing Co., Ltd. Waveguide horn antenna, antenna device, and radar device
JP2013509564A (en) * 2009-11-02 2013-03-14 ベ パク，ヨン Composite plasma generator
JP2018507508A (en) * 2015-01-07 2018-03-15 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Workpiece processing chamber having a rotating microplasma antenna with a slotted helical waveguide
US10685812B2 (en) 2015-01-07 2020-06-16 Applied Materials, Inc. Workpiece processing chamber having a rotary microwave plasma antenna with slotted spiral waveguide

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