JPS5222743B2 - - Google Patents
Info
- Publication number
- JPS5222743B2 JPS5222743B2 JP2493273A JP2493273A JPS5222743B2 JP S5222743 B2 JPS5222743 B2 JP S5222743B2 JP 2493273 A JP2493273 A JP 2493273A JP 2493273 A JP2493273 A JP 2493273A JP S5222743 B2 JPS5222743 B2 JP S5222743B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2493273A JPS5222743B2 (enExample) | 1973-03-02 | 1973-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2493273A JPS5222743B2 (enExample) | 1973-03-02 | 1973-03-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49113737A JPS49113737A (enExample) | 1974-10-30 |
| JPS5222743B2 true JPS5222743B2 (enExample) | 1977-06-20 |
Family
ID=12151850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2493273A Expired JPS5222743B2 (enExample) | 1973-03-02 | 1973-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5222743B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4747907A (en) * | 1986-10-29 | 1988-05-31 | International Business Machines Corporation | Metal etching process with etch rate enhancement |
-
1973
- 1973-03-02 JP JP2493273A patent/JPS5222743B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49113737A (enExample) | 1974-10-30 |