JPS522262B2 - - Google Patents

Info

Publication number
JPS522262B2
JPS522262B2 JP5972073A JP5972073A JPS522262B2 JP S522262 B2 JPS522262 B2 JP S522262B2 JP 5972073 A JP5972073 A JP 5972073A JP 5972073 A JP5972073 A JP 5972073A JP S522262 B2 JPS522262 B2 JP S522262B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5972073A
Other versions
JPS5011378A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5972073A priority Critical patent/JPS522262B2/ja
Publication of JPS5011378A publication Critical patent/JPS5011378A/ja
Publication of JPS522262B2 publication Critical patent/JPS522262B2/ja
Expired legal-status Critical Current

Links

JP5972073A 1973-05-30 1973-05-30 Expired JPS522262B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5972073A JPS522262B2 (ja) 1973-05-30 1973-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5972073A JPS522262B2 (ja) 1973-05-30 1973-05-30

Publications (2)

Publication Number Publication Date
JPS5011378A JPS5011378A (ja) 1975-02-05
JPS522262B2 true JPS522262B2 (ja) 1977-01-20

Family

ID=13121307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5972073A Expired JPS522262B2 (ja) 1973-05-30 1973-05-30

Country Status (1)

Country Link
JP (1) JPS522262B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539615U (ja) * 1978-09-07 1980-03-14

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54155473U (ja) * 1978-04-19 1979-10-29
JPH0669101B2 (ja) * 1983-08-25 1994-08-31 松下電子工業株式会社 半導体装置の製造方法
JP2014041920A (ja) * 2012-08-22 2014-03-06 Rohm Co Ltd 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539615U (ja) * 1978-09-07 1980-03-14

Also Published As

Publication number Publication date
JPS5011378A (ja) 1975-02-05

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