JPS5221710Y2 - - Google Patents

Info

Publication number
JPS5221710Y2
JPS5221710Y2 JP6993273U JP6993273U JPS5221710Y2 JP S5221710 Y2 JPS5221710 Y2 JP S5221710Y2 JP 6993273 U JP6993273 U JP 6993273U JP 6993273 U JP6993273 U JP 6993273U JP S5221710 Y2 JPS5221710 Y2 JP S5221710Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6993273U
Other languages
Japanese (ja)
Other versions
JPS5017517U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6993273U priority Critical patent/JPS5221710Y2/ja
Publication of JPS5017517U publication Critical patent/JPS5017517U/ja
Application granted granted Critical
Publication of JPS5221710Y2 publication Critical patent/JPS5221710Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6993273U 1973-06-13 1973-06-13 Expired JPS5221710Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6993273U JPS5221710Y2 (enrdf_load_html_response) 1973-06-13 1973-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6993273U JPS5221710Y2 (enrdf_load_html_response) 1973-06-13 1973-06-13

Publications (2)

Publication Number Publication Date
JPS5017517U JPS5017517U (enrdf_load_html_response) 1975-02-25
JPS5221710Y2 true JPS5221710Y2 (enrdf_load_html_response) 1977-05-18

Family

ID=28238275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6993273U Expired JPS5221710Y2 (enrdf_load_html_response) 1973-06-13 1973-06-13

Country Status (1)

Country Link
JP (1) JPS5221710Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221280A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion

Also Published As

Publication number Publication date
JPS5017517U (enrdf_load_html_response) 1975-02-25

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