JPS5221472B1 - - Google Patents
Info
- Publication number
- JPS5221472B1 JPS5221472B1 JP3463171A JP3463171A JPS5221472B1 JP S5221472 B1 JPS5221472 B1 JP S5221472B1 JP 3463171 A JP3463171 A JP 3463171A JP 3463171 A JP3463171 A JP 3463171A JP S5221472 B1 JPS5221472 B1 JP S5221472B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3463171A JPS5221472B1 (en) | 1971-05-21 | 1971-05-21 | |
| US254902A US3916034A (en) | 1971-05-21 | 1972-05-19 | Method of transporting substances in a plasma stream to and depositing it on a target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3463171A JPS5221472B1 (en) | 1971-05-21 | 1971-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5221472B1 true JPS5221472B1 (en) | 1977-06-10 |
Family
ID=12419734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3463171A Pending JPS5221472B1 (en) | 1971-05-21 | 1971-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5221472B1 (en) |
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1971
- 1971-05-21 JP JP3463171A patent/JPS5221472B1/ja active Pending