JPS5221332Y2 - - Google Patents

Info

Publication number
JPS5221332Y2
JPS5221332Y2 JP6285172U JP6285172U JPS5221332Y2 JP S5221332 Y2 JPS5221332 Y2 JP S5221332Y2 JP 6285172 U JP6285172 U JP 6285172U JP 6285172 U JP6285172 U JP 6285172U JP S5221332 Y2 JPS5221332 Y2 JP S5221332Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6285172U
Other languages
Japanese (ja)
Other versions
JPS4922117U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6285172U priority Critical patent/JPS5221332Y2/ja
Publication of JPS4922117U publication Critical patent/JPS4922117U/ja
Application granted granted Critical
Publication of JPS5221332Y2 publication Critical patent/JPS5221332Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6285172U 1972-05-30 1972-05-30 Expired JPS5221332Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6285172U JPS5221332Y2 (enrdf_load_stackoverflow) 1972-05-30 1972-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6285172U JPS5221332Y2 (enrdf_load_stackoverflow) 1972-05-30 1972-05-30

Publications (2)

Publication Number Publication Date
JPS4922117U JPS4922117U (enrdf_load_stackoverflow) 1974-02-25
JPS5221332Y2 true JPS5221332Y2 (enrdf_load_stackoverflow) 1977-05-16

Family

ID=27953441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6285172U Expired JPS5221332Y2 (enrdf_load_stackoverflow) 1972-05-30 1972-05-30

Country Status (1)

Country Link
JP (1) JPS5221332Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0397479U (enrdf_load_stackoverflow) * 1990-01-26 1991-10-07

Also Published As

Publication number Publication date
JPS4922117U (enrdf_load_stackoverflow) 1974-02-25

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