JPS5221332U - - Google Patents
Info
- Publication number
- JPS5221332U JPS5221332U JP10588775U JP10588775U JPS5221332U JP S5221332 U JPS5221332 U JP S5221332U JP 10588775 U JP10588775 U JP 10588775U JP 10588775 U JP10588775 U JP 10588775U JP S5221332 U JPS5221332 U JP S5221332U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10588775U JPS5221332U (fr) | 1975-08-01 | 1975-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10588775U JPS5221332U (fr) | 1975-08-01 | 1975-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5221332U true JPS5221332U (fr) | 1977-02-15 |
Family
ID=28587171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10588775U Pending JPS5221332U (fr) | 1975-08-01 | 1975-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5221332U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924132U (ja) * | 1982-08-09 | 1984-02-15 | 株式会社東芝 | マイクロ波プラズマ処理装置 |
| JPH02151021A (ja) * | 1988-12-02 | 1990-06-11 | Agency Of Ind Science & Technol | プラズマ加工堆積装置 |
-
1975
- 1975-08-01 JP JP10588775U patent/JPS5221332U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924132U (ja) * | 1982-08-09 | 1984-02-15 | 株式会社東芝 | マイクロ波プラズマ処理装置 |
| JPS6236240Y2 (fr) * | 1982-08-09 | 1987-09-14 | ||
| JPH02151021A (ja) * | 1988-12-02 | 1990-06-11 | Agency Of Ind Science & Technol | プラズマ加工堆積装置 |