JPS5221230A - Gaseous phase plating method onto inner surface of tubular body - Google Patents

Gaseous phase plating method onto inner surface of tubular body

Info

Publication number
JPS5221230A
JPS5221230A JP9835675A JP9835675A JPS5221230A JP S5221230 A JPS5221230 A JP S5221230A JP 9835675 A JP9835675 A JP 9835675A JP 9835675 A JP9835675 A JP 9835675A JP S5221230 A JPS5221230 A JP S5221230A
Authority
JP
Japan
Prior art keywords
tubular body
plating method
gaseous phase
onto inner
method onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9835675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5536265B2 (enrdf_load_stackoverflow
Inventor
Shigei Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP9835675A priority Critical patent/JPS5221230A/ja
Publication of JPS5221230A publication Critical patent/JPS5221230A/ja
Publication of JPS5536265B2 publication Critical patent/JPS5536265B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP9835675A 1975-08-13 1975-08-13 Gaseous phase plating method onto inner surface of tubular body Granted JPS5221230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9835675A JPS5221230A (en) 1975-08-13 1975-08-13 Gaseous phase plating method onto inner surface of tubular body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9835675A JPS5221230A (en) 1975-08-13 1975-08-13 Gaseous phase plating method onto inner surface of tubular body

Publications (2)

Publication Number Publication Date
JPS5221230A true JPS5221230A (en) 1977-02-17
JPS5536265B2 JPS5536265B2 (enrdf_load_stackoverflow) 1980-09-19

Family

ID=14217598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9835675A Granted JPS5221230A (en) 1975-08-13 1975-08-13 Gaseous phase plating method onto inner surface of tubular body

Country Status (1)

Country Link
JP (1) JPS5221230A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120783A (en) * 1974-08-14 1976-02-19 Hitachi Ltd Kinitsuna cvd makuno keiseiho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120783A (en) * 1974-08-14 1976-02-19 Hitachi Ltd Kinitsuna cvd makuno keiseiho

Also Published As

Publication number Publication date
JPS5536265B2 (enrdf_load_stackoverflow) 1980-09-19

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