JPS5221223A - Chemical polishing solution for copper and its alloy - Google Patents

Chemical polishing solution for copper and its alloy

Info

Publication number
JPS5221223A
JPS5221223A JP9839375A JP9839375A JPS5221223A JP S5221223 A JPS5221223 A JP S5221223A JP 9839375 A JP9839375 A JP 9839375A JP 9839375 A JP9839375 A JP 9839375A JP S5221223 A JPS5221223 A JP S5221223A
Authority
JP
Japan
Prior art keywords
alloy
copper
chemical polishing
polishing solution
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9839375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5536270B2 (enrdf_load_stackoverflow
Inventor
Tadaaki Marushima
Tooru Hayakawa
Yukitomo Gotou
Kenji Ishii
Itaru Iketani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Gas Chemical Co Inc
Original Assignee
Mitsubishi Gas Chemical Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Gas Chemical Co Inc filed Critical Mitsubishi Gas Chemical Co Inc
Priority to JP9839375A priority Critical patent/JPS5221223A/ja
Publication of JPS5221223A publication Critical patent/JPS5221223A/ja
Publication of JPS5536270B2 publication Critical patent/JPS5536270B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP9839375A 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy Granted JPS5221223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9839375A JPS5221223A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9839375A JPS5221223A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Publications (2)

Publication Number Publication Date
JPS5221223A true JPS5221223A (en) 1977-02-17
JPS5536270B2 JPS5536270B2 (enrdf_load_stackoverflow) 1980-09-19

Family

ID=14218586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9839375A Granted JPS5221223A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Country Status (1)

Country Link
JP (1) JPS5221223A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448058U (enrdf_load_stackoverflow) * 1977-09-09 1979-04-03
US4981553A (en) * 1987-09-25 1991-01-01 Solvay & Cie (Societe Anonyme) Copper etching bath and method of using
GB2200136B (en) * 1987-01-12 1991-05-22 Nihon Parkerizing Cleaning of aluminium surfaces

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50140333A (enrdf_load_stackoverflow) * 1974-04-27 1975-11-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50140333A (enrdf_load_stackoverflow) * 1974-04-27 1975-11-11

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448058U (enrdf_load_stackoverflow) * 1977-09-09 1979-04-03
GB2200136B (en) * 1987-01-12 1991-05-22 Nihon Parkerizing Cleaning of aluminium surfaces
US4981553A (en) * 1987-09-25 1991-01-01 Solvay & Cie (Societe Anonyme) Copper etching bath and method of using

Also Published As

Publication number Publication date
JPS5536270B2 (enrdf_load_stackoverflow) 1980-09-19

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