JPS5219758B2 - - Google Patents
Info
- Publication number
- JPS5219758B2 JPS5219758B2 JP1712572A JP1712572A JPS5219758B2 JP S5219758 B2 JPS5219758 B2 JP S5219758B2 JP 1712572 A JP1712572 A JP 1712572A JP 1712572 A JP1712572 A JP 1712572A JP S5219758 B2 JPS5219758 B2 JP S5219758B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1712572A JPS5219758B2 (https=) | 1972-02-18 | 1972-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1712572A JPS5219758B2 (https=) | 1972-02-18 | 1972-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4887772A JPS4887772A (https=) | 1973-11-17 |
| JPS5219758B2 true JPS5219758B2 (https=) | 1977-05-30 |
Family
ID=11935300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1712572A Expired JPS5219758B2 (https=) | 1972-02-18 | 1972-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5219758B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5728942B2 (https=) * | 1973-12-22 | 1982-06-19 | ||
| JPS5188174A (en) * | 1975-01-31 | 1976-08-02 | Handotaisochino seizohoho | |
| JPS5773930A (en) * | 1980-10-27 | 1982-05-08 | Toshiba Corp | Forming method for polycrystalline silicon film with addition of impurities for diffusion source |
-
1972
- 1972-02-18 JP JP1712572A patent/JPS5219758B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4887772A (https=) | 1973-11-17 |