JPS5218599A - Power source device for charged beam system - Google Patents

Power source device for charged beam system

Info

Publication number
JPS5218599A
JPS5218599A JP50093949A JP9394975A JPS5218599A JP S5218599 A JPS5218599 A JP S5218599A JP 50093949 A JP50093949 A JP 50093949A JP 9394975 A JP9394975 A JP 9394975A JP S5218599 A JPS5218599 A JP S5218599A
Authority
JP
Japan
Prior art keywords
power source
source device
beam system
charged beam
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50093949A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228560B2 (enrdf_load_stackoverflow
Inventor
Kikuo Koga
Akio Fukui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP50093949A priority Critical patent/JPS5218599A/ja
Publication of JPS5218599A publication Critical patent/JPS5218599A/ja
Publication of JPS6228560B2 publication Critical patent/JPS6228560B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Discharge Heating (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Control Of Voltage And Current In General (AREA)
JP50093949A 1975-08-01 1975-08-01 Power source device for charged beam system Granted JPS5218599A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50093949A JPS5218599A (en) 1975-08-01 1975-08-01 Power source device for charged beam system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50093949A JPS5218599A (en) 1975-08-01 1975-08-01 Power source device for charged beam system

Publications (2)

Publication Number Publication Date
JPS5218599A true JPS5218599A (en) 1977-02-12
JPS6228560B2 JPS6228560B2 (enrdf_load_stackoverflow) 1987-06-20

Family

ID=14096676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50093949A Granted JPS5218599A (en) 1975-08-01 1975-08-01 Power source device for charged beam system

Country Status (1)

Country Link
JP (1) JPS5218599A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55145170A (en) * 1979-04-28 1980-11-12 Tokuda Seisakusho Ltd Arc-breaking method of direct current electric discharge unit and its circuit
JPS5680552A (en) * 1979-11-26 1981-07-01 Keikan Kin Automatic stepless speed change device
US5552590A (en) * 1992-09-08 1996-09-03 Nippondenso Co., Ltd. Optical information reading apparatus having means for judging laser deterioration

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63212581A (ja) * 1987-12-04 1988-09-05 Canon Inc インクリボンカセットおよび該カセットを装着した記録装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827278A (enrdf_load_stackoverflow) * 1971-08-18 1973-04-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827278A (enrdf_load_stackoverflow) * 1971-08-18 1973-04-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55145170A (en) * 1979-04-28 1980-11-12 Tokuda Seisakusho Ltd Arc-breaking method of direct current electric discharge unit and its circuit
JPS5680552A (en) * 1979-11-26 1981-07-01 Keikan Kin Automatic stepless speed change device
US5552590A (en) * 1992-09-08 1996-09-03 Nippondenso Co., Ltd. Optical information reading apparatus having means for judging laser deterioration

Also Published As

Publication number Publication date
JPS6228560B2 (enrdf_load_stackoverflow) 1987-06-20

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