JPS5218530Y2 - - Google Patents
Info
- Publication number
- JPS5218530Y2 JPS5218530Y2 JP6205072U JP6205072U JPS5218530Y2 JP S5218530 Y2 JPS5218530 Y2 JP S5218530Y2 JP 6205072 U JP6205072 U JP 6205072U JP 6205072 U JP6205072 U JP 6205072U JP S5218530 Y2 JPS5218530 Y2 JP S5218530Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6205072U JPS5218530Y2 (fr) | 1972-05-29 | 1972-05-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6205072U JPS5218530Y2 (fr) | 1972-05-29 | 1972-05-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4922679U JPS4922679U (fr) | 1974-02-26 |
JPS5218530Y2 true JPS5218530Y2 (fr) | 1977-04-26 |
Family
ID=27951983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6205072U Expired JPS5218530Y2 (fr) | 1972-05-29 | 1972-05-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5218530Y2 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0189279B1 (fr) * | 1985-01-22 | 1991-10-09 | Applied Materials, Inc. | Système de traitement de semi-conducteurs |
-
1972
- 1972-05-29 JP JP6205072U patent/JPS5218530Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4922679U (fr) | 1974-02-26 |