JPS5218425B2 - - Google Patents
Info
- Publication number
- JPS5218425B2 JPS5218425B2 JP4259372A JP4259372A JPS5218425B2 JP S5218425 B2 JPS5218425 B2 JP S5218425B2 JP 4259372 A JP4259372 A JP 4259372A JP 4259372 A JP4259372 A JP 4259372A JP S5218425 B2 JPS5218425 B2 JP S5218425B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259372A JPS5218425B2 (https=) | 1972-05-01 | 1972-05-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259372A JPS5218425B2 (https=) | 1972-05-01 | 1972-05-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS494261A JPS494261A (https=) | 1974-01-16 |
| JPS5218425B2 true JPS5218425B2 (https=) | 1977-05-21 |
Family
ID=12640350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4259372A Expired JPS5218425B2 (https=) | 1972-05-01 | 1972-05-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5218425B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5788746A (en) * | 1980-11-25 | 1982-06-02 | Fujitsu Ltd | Preparation of semiconductor device |
| US4592132A (en) * | 1984-12-07 | 1986-06-03 | Hughes Aircraft Company | Process for fabricating multi-level-metal integrated circuits at high yields |
-
1972
- 1972-05-01 JP JP4259372A patent/JPS5218425B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS494261A (https=) | 1974-01-16 |