JPS52170853U - - Google Patents
Info
- Publication number
- JPS52170853U JPS52170853U JP7989776U JP7989776U JPS52170853U JP S52170853 U JPS52170853 U JP S52170853U JP 7989776 U JP7989776 U JP 7989776U JP 7989776 U JP7989776 U JP 7989776U JP S52170853 U JPS52170853 U JP S52170853U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7989776U JPS561725Y2 (https=) | 1976-06-18 | 1976-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7989776U JPS561725Y2 (https=) | 1976-06-18 | 1976-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52170853U true JPS52170853U (https=) | 1977-12-26 |
| JPS561725Y2 JPS561725Y2 (https=) | 1981-01-16 |
Family
ID=28558172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7989776U Expired JPS561725Y2 (https=) | 1976-06-18 | 1976-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS561725Y2 (https=) |
-
1976
- 1976-06-18 JP JP7989776U patent/JPS561725Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS561725Y2 (https=) | 1981-01-16 |