JPS52170852U - - Google Patents
Info
- Publication number
- JPS52170852U JPS52170852U JP7893676U JP7893676U JPS52170852U JP S52170852 U JPS52170852 U JP S52170852U JP 7893676 U JP7893676 U JP 7893676U JP 7893676 U JP7893676 U JP 7893676U JP S52170852 U JPS52170852 U JP S52170852U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7893676U JPS52170852U (cs) | 1976-06-18 | 1976-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7893676U JPS52170852U (cs) | 1976-06-18 | 1976-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52170852U true JPS52170852U (cs) | 1977-12-26 |
Family
ID=28556284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7893676U Pending JPS52170852U (cs) | 1976-06-18 | 1976-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52170852U (cs) |
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1976
- 1976-06-18 JP JP7893676U patent/JPS52170852U/ja active Pending