JPS52170851U - - Google Patents
Info
- Publication number
- JPS52170851U JPS52170851U JP7893576U JP7893576U JPS52170851U JP S52170851 U JPS52170851 U JP S52170851U JP 7893576 U JP7893576 U JP 7893576U JP 7893576 U JP7893576 U JP 7893576U JP S52170851 U JPS52170851 U JP S52170851U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7893576U JPS52170851U (el) | 1976-06-18 | 1976-06-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7893576U JPS52170851U (el) | 1976-06-18 | 1976-06-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52170851U true JPS52170851U (el) | 1977-12-26 |
Family
ID=28556282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7893576U Pending JPS52170851U (el) | 1976-06-18 | 1976-06-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52170851U (el) |
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1976
- 1976-06-18 JP JP7893576U patent/JPS52170851U/ja active Pending