JPS52167453U - - Google Patents
Info
- Publication number
- JPS52167453U JPS52167453U JP7632276U JP7632276U JPS52167453U JP S52167453 U JPS52167453 U JP S52167453U JP 7632276 U JP7632276 U JP 7632276U JP 7632276 U JP7632276 U JP 7632276U JP S52167453 U JPS52167453 U JP S52167453U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7632276U JPS5618632Y2 (fi) | 1976-06-14 | 1976-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7632276U JPS5618632Y2 (fi) | 1976-06-14 | 1976-06-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52167453U true JPS52167453U (fi) | 1977-12-19 |
| JPS5618632Y2 JPS5618632Y2 (fi) | 1981-05-01 |
Family
ID=28551220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7632276U Expired JPS5618632Y2 (fi) | 1976-06-14 | 1976-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5618632Y2 (fi) |
-
1976
- 1976-06-14 JP JP7632276U patent/JPS5618632Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5618632Y2 (fi) | 1981-05-01 |