JPS52165339U - - Google Patents
Info
- Publication number
- JPS52165339U JPS52165339U JP7422676U JP7422676U JPS52165339U JP S52165339 U JPS52165339 U JP S52165339U JP 7422676 U JP7422676 U JP 7422676U JP 7422676 U JP7422676 U JP 7422676U JP S52165339 U JPS52165339 U JP S52165339U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Surface Heating Bodies (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7422676U JPS5611759Y2 (pl) | 1976-06-07 | 1976-06-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7422676U JPS5611759Y2 (pl) | 1976-06-07 | 1976-06-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52165339U true JPS52165339U (pl) | 1977-12-14 |
JPS5611759Y2 JPS5611759Y2 (pl) | 1981-03-17 |
Family
ID=28547202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7422676U Expired JPS5611759Y2 (pl) | 1976-06-07 | 1976-06-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5611759Y2 (pl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62272441A (ja) * | 1986-05-20 | 1987-11-26 | Tokyo Electron Ltd | イオン注入装置におけるウエハ保持装置 |
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1976
- 1976-06-07 JP JP7422676U patent/JPS5611759Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62272441A (ja) * | 1986-05-20 | 1987-11-26 | Tokyo Electron Ltd | イオン注入装置におけるウエハ保持装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5611759Y2 (pl) | 1981-03-17 |