JPS52164251U - - Google Patents

Info

Publication number
JPS52164251U
JPS52164251U JP7321076U JP7321076U JPS52164251U JP S52164251 U JPS52164251 U JP S52164251U JP 7321076 U JP7321076 U JP 7321076U JP 7321076 U JP7321076 U JP 7321076U JP S52164251 U JPS52164251 U JP S52164251U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7321076U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7321076U priority Critical patent/JPS52164251U/ja
Publication of JPS52164251U publication Critical patent/JPS52164251U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP7321076U 1976-06-08 1976-06-08 Pending JPS52164251U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7321076U JPS52164251U (enrdf_load_stackoverflow) 1976-06-08 1976-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7321076U JPS52164251U (enrdf_load_stackoverflow) 1976-06-08 1976-06-08

Publications (1)

Publication Number Publication Date
JPS52164251U true JPS52164251U (enrdf_load_stackoverflow) 1977-12-13

Family

ID=28545233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7321076U Pending JPS52164251U (enrdf_load_stackoverflow) 1976-06-08 1976-06-08

Country Status (1)

Country Link
JP (1) JPS52164251U (enrdf_load_stackoverflow)

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