JPS52157035U - - Google Patents

Info

Publication number
JPS52157035U
JPS52157035U JP6634276U JP6634276U JPS52157035U JP S52157035 U JPS52157035 U JP S52157035U JP 6634276 U JP6634276 U JP 6634276U JP 6634276 U JP6634276 U JP 6634276U JP S52157035 U JPS52157035 U JP S52157035U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6634276U
Other languages
Japanese (ja)
Other versions
JPS5615513Y2 (ref
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6634276U priority Critical patent/JPS5615513Y2/ja
Publication of JPS52157035U publication Critical patent/JPS52157035U/ja
Application granted granted Critical
Publication of JPS5615513Y2 publication Critical patent/JPS5615513Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
JP6634276U 1976-05-24 1976-05-24 Expired JPS5615513Y2 (ref)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6634276U JPS5615513Y2 (ref) 1976-05-24 1976-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6634276U JPS5615513Y2 (ref) 1976-05-24 1976-05-24

Publications (2)

Publication Number Publication Date
JPS52157035U true JPS52157035U (ref) 1977-11-29
JPS5615513Y2 JPS5615513Y2 (ref) 1981-04-10

Family

ID=28532150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6634276U Expired JPS5615513Y2 (ref) 1976-05-24 1976-05-24

Country Status (1)

Country Link
JP (1) JPS5615513Y2 (ref)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9829145B2 (en) 2012-10-18 2017-11-28 Tokyo Electron Limited Manufacturing method of heat insulation wall body and heat insulation wall body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9829145B2 (en) 2012-10-18 2017-11-28 Tokyo Electron Limited Manufacturing method of heat insulation wall body and heat insulation wall body

Also Published As

Publication number Publication date
JPS5615513Y2 (ref) 1981-04-10

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