JPS52156659U - - Google Patents
Info
- Publication number
- JPS52156659U JPS52156659U JP6640176U JP6640176U JPS52156659U JP S52156659 U JPS52156659 U JP S52156659U JP 6640176 U JP6640176 U JP 6640176U JP 6640176 U JP6640176 U JP 6640176U JP S52156659 U JPS52156659 U JP S52156659U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976066401U JPS5715802Y2 (fr) | 1976-05-24 | 1976-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976066401U JPS5715802Y2 (fr) | 1976-05-24 | 1976-05-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52156659U true JPS52156659U (fr) | 1977-11-28 |
| JPS5715802Y2 JPS5715802Y2 (fr) | 1982-04-02 |
Family
ID=28532263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976066401U Expired JPS5715802Y2 (fr) | 1976-05-24 | 1976-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5715802Y2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006245206A (ja) * | 2005-03-02 | 2006-09-14 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
-
1976
- 1976-05-24 JP JP1976066401U patent/JPS5715802Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006245206A (ja) * | 2005-03-02 | 2006-09-14 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
| JP4592449B2 (ja) * | 2005-03-02 | 2010-12-01 | 信越ポリマー株式会社 | 基板収納容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5715802Y2 (fr) | 1982-04-02 |