JPS52156196A - Ozonizer - Google Patents

Ozonizer

Info

Publication number
JPS52156196A
JPS52156196A JP7417176A JP7417176A JPS52156196A JP S52156196 A JPS52156196 A JP S52156196A JP 7417176 A JP7417176 A JP 7417176A JP 7417176 A JP7417176 A JP 7417176A JP S52156196 A JPS52156196 A JP S52156196A
Authority
JP
Japan
Prior art keywords
ozonizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7417176A
Other languages
Japanese (ja)
Inventor
Masao Ookubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Original Assignee
Japan Electronic Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to JP7417176A priority Critical patent/JPS52156196A/en
Publication of JPS52156196A publication Critical patent/JPS52156196A/en
Pending legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP7417176A 1976-06-22 1976-06-22 Ozonizer Pending JPS52156196A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7417176A JPS52156196A (en) 1976-06-22 1976-06-22 Ozonizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7417176A JPS52156196A (en) 1976-06-22 1976-06-22 Ozonizer

Publications (1)

Publication Number Publication Date
JPS52156196A true JPS52156196A (en) 1977-12-26

Family

ID=13539433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7417176A Pending JPS52156196A (en) 1976-06-22 1976-06-22 Ozonizer

Country Status (1)

Country Link
JP (1) JPS52156196A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63230506A (en) * 1987-03-20 1988-09-27 Ito Isao Ozonizer
US5032571A (en) * 1988-07-05 1991-07-16 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing oxide superconducting materials

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114242B1 (en) * 1969-12-29 1976-05-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114242B1 (en) * 1969-12-29 1976-05-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63230506A (en) * 1987-03-20 1988-09-27 Ito Isao Ozonizer
US5032571A (en) * 1988-07-05 1991-07-16 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing oxide superconducting materials

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