JPS5215430U - - Google Patents

Info

Publication number
JPS5215430U
JPS5215430U JP10191775U JP10191775U JPS5215430U JP S5215430 U JPS5215430 U JP S5215430U JP 10191775 U JP10191775 U JP 10191775U JP 10191775 U JP10191775 U JP 10191775U JP S5215430 U JPS5215430 U JP S5215430U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10191775U
Other languages
Japanese (ja)
Other versions
JPS5521553Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10191775U priority Critical patent/JPS5521553Y2/ja
Publication of JPS5215430U publication Critical patent/JPS5215430U/ja
Application granted granted Critical
Publication of JPS5521553Y2 publication Critical patent/JPS5521553Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Harvester Elements (AREA)
JP10191775U 1975-07-22 1975-07-22 Expired JPS5521553Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10191775U JPS5521553Y2 (enExample) 1975-07-22 1975-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10191775U JPS5521553Y2 (enExample) 1975-07-22 1975-07-22

Publications (2)

Publication Number Publication Date
JPS5215430U true JPS5215430U (enExample) 1977-02-03
JPS5521553Y2 JPS5521553Y2 (enExample) 1980-05-23

Family

ID=28583375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10191775U Expired JPS5521553Y2 (enExample) 1975-07-22 1975-07-22

Country Status (1)

Country Link
JP (1) JPS5521553Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752718B2 (ja) 1984-11-26 1995-06-05 株式会社半導体エネルギー研究所 薄膜形成方法

Also Published As

Publication number Publication date
JPS5521553Y2 (enExample) 1980-05-23

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