JPS5215430U - - Google Patents

Info

Publication number
JPS5215430U
JPS5215430U JP10191775U JP10191775U JPS5215430U JP S5215430 U JPS5215430 U JP S5215430U JP 10191775 U JP10191775 U JP 10191775U JP 10191775 U JP10191775 U JP 10191775U JP S5215430 U JPS5215430 U JP S5215430U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10191775U
Other languages
Japanese (ja)
Other versions
JPS5521553Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10191775U priority Critical patent/JPS5521553Y2/ja
Publication of JPS5215430U publication Critical patent/JPS5215430U/ja
Application granted granted Critical
Publication of JPS5521553Y2 publication Critical patent/JPS5521553Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Harvester Elements (AREA)
JP10191775U 1975-07-22 1975-07-22 Expired JPS5521553Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10191775U JPS5521553Y2 (cg-RX-API-DMAC7.html) 1975-07-22 1975-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10191775U JPS5521553Y2 (cg-RX-API-DMAC7.html) 1975-07-22 1975-07-22

Publications (2)

Publication Number Publication Date
JPS5215430U true JPS5215430U (cg-RX-API-DMAC7.html) 1977-02-03
JPS5521553Y2 JPS5521553Y2 (cg-RX-API-DMAC7.html) 1980-05-23

Family

ID=28583375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10191775U Expired JPS5521553Y2 (cg-RX-API-DMAC7.html) 1975-07-22 1975-07-22

Country Status (1)

Country Link
JP (1) JPS5521553Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752718B2 (ja) 1984-11-26 1995-06-05 株式会社半導体エネルギー研究所 薄膜形成方法

Also Published As

Publication number Publication date
JPS5521553Y2 (cg-RX-API-DMAC7.html) 1980-05-23

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