JPS52152676U - - Google Patents
Info
- Publication number
- JPS52152676U JPS52152676U JP6200476U JP6200476U JPS52152676U JP S52152676 U JPS52152676 U JP S52152676U JP 6200476 U JP6200476 U JP 6200476U JP 6200476 U JP6200476 U JP 6200476U JP S52152676 U JPS52152676 U JP S52152676U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6200476U JPS5831403Y2 (ja) | 1976-05-14 | 1976-05-14 | 半導体装置の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6200476U JPS5831403Y2 (ja) | 1976-05-14 | 1976-05-14 | 半導体装置の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52152676U true JPS52152676U (en:Method) | 1977-11-18 |
| JPS5831403Y2 JPS5831403Y2 (ja) | 1983-07-12 |
Family
ID=28523982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6200476U Expired JPS5831403Y2 (ja) | 1976-05-14 | 1976-05-14 | 半導体装置の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5831403Y2 (en:Method) |
-
1976
- 1976-05-14 JP JP6200476U patent/JPS5831403Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5831403Y2 (ja) | 1983-07-12 |