JPS52152177A - Composition for boron ion source and its usage - Google Patents

Composition for boron ion source and its usage

Info

Publication number
JPS52152177A
JPS52152177A JP7005876A JP7005876A JPS52152177A JP S52152177 A JPS52152177 A JP S52152177A JP 7005876 A JP7005876 A JP 7005876A JP 7005876 A JP7005876 A JP 7005876A JP S52152177 A JPS52152177 A JP S52152177A
Authority
JP
Japan
Prior art keywords
usage
composition
ion source
boron ion
boron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7005876A
Other languages
Japanese (ja)
Inventor
Hidekazu Okabayashi
Masao Ueki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7005876A priority Critical patent/JPS52152177A/en
Publication of JPS52152177A publication Critical patent/JPS52152177A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Ceramic Products (AREA)

Abstract

PURPOSE:To obtain a crucible form body which becomes a stable supply source for boron by sintering 1 to 30% of boron oxide and the rest of boron nitride to a stable and harmless solid.
JP7005876A 1976-06-14 1976-06-14 Composition for boron ion source and its usage Pending JPS52152177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7005876A JPS52152177A (en) 1976-06-14 1976-06-14 Composition for boron ion source and its usage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7005876A JPS52152177A (en) 1976-06-14 1976-06-14 Composition for boron ion source and its usage

Publications (1)

Publication Number Publication Date
JPS52152177A true JPS52152177A (en) 1977-12-17

Family

ID=13420560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7005876A Pending JPS52152177A (en) 1976-06-14 1976-06-14 Composition for boron ion source and its usage

Country Status (1)

Country Link
JP (1) JPS52152177A (en)

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