JPS5215168U - - Google Patents

Info

Publication number
JPS5215168U
JPS5215168U JP10116075U JP10116075U JPS5215168U JP S5215168 U JPS5215168 U JP S5215168U JP 10116075 U JP10116075 U JP 10116075U JP 10116075 U JP10116075 U JP 10116075U JP S5215168 U JPS5215168 U JP S5215168U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10116075U
Other languages
Japanese (ja)
Other versions
JPS543647Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10116075U priority Critical patent/JPS543647Y2/ja
Publication of JPS5215168U publication Critical patent/JPS5215168U/ja
Application granted granted Critical
Publication of JPS543647Y2 publication Critical patent/JPS543647Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP10116075U 1975-07-21 1975-07-21 Expired JPS543647Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10116075U JPS543647Y2 (https=) 1975-07-21 1975-07-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10116075U JPS543647Y2 (https=) 1975-07-21 1975-07-21

Publications (2)

Publication Number Publication Date
JPS5215168U true JPS5215168U (https=) 1977-02-02
JPS543647Y2 JPS543647Y2 (https=) 1979-02-20

Family

ID=28582669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10116075U Expired JPS543647Y2 (https=) 1975-07-21 1975-07-21

Country Status (1)

Country Link
JP (1) JPS543647Y2 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5892729U (ja) * 1981-12-17 1983-06-23 山形日本電気株式会社 半導体製造装置
JPS59125140U (ja) * 1983-02-08 1984-08-23 横河電機株式会社 アナログスイツチ
JPS60101831U (ja) * 1983-12-16 1985-07-11 ヤマハ株式会社 信号切換回路

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5892729U (ja) * 1981-12-17 1983-06-23 山形日本電気株式会社 半導体製造装置
JPS59125140U (ja) * 1983-02-08 1984-08-23 横河電機株式会社 アナログスイツチ
JPS60101831U (ja) * 1983-12-16 1985-07-11 ヤマハ株式会社 信号切換回路

Also Published As

Publication number Publication date
JPS543647Y2 (https=) 1979-02-20

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