JPS5215074B2 - - Google Patents

Info

Publication number
JPS5215074B2
JPS5215074B2 JP9620272A JP9620272A JPS5215074B2 JP S5215074 B2 JPS5215074 B2 JP S5215074B2 JP 9620272 A JP9620272 A JP 9620272A JP 9620272 A JP9620272 A JP 9620272A JP S5215074 B2 JPS5215074 B2 JP S5215074B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9620272A
Other languages
Japanese (ja)
Other versions
JPS4954277A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9620272A priority Critical patent/JPS5215074B2/ja
Publication of JPS4954277A publication Critical patent/JPS4954277A/ja
Publication of JPS5215074B2 publication Critical patent/JPS5215074B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP9620272A 1972-09-27 1972-09-27 Expired JPS5215074B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9620272A JPS5215074B2 (en:Method) 1972-09-27 1972-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9620272A JPS5215074B2 (en:Method) 1972-09-27 1972-09-27

Publications (2)

Publication Number Publication Date
JPS4954277A JPS4954277A (en:Method) 1974-05-27
JPS5215074B2 true JPS5215074B2 (en:Method) 1977-04-26

Family

ID=14158678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9620272A Expired JPS5215074B2 (en:Method) 1972-09-27 1972-09-27

Country Status (1)

Country Link
JP (1) JPS5215074B2 (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57116338U (en:Method) * 1981-01-07 1982-07-19
JPS57181441U (en:Method) * 1981-05-14 1982-11-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57116338U (en:Method) * 1981-01-07 1982-07-19
JPS57181441U (en:Method) * 1981-05-14 1982-11-17

Also Published As

Publication number Publication date
JPS4954277A (en:Method) 1974-05-27

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