JPS52149606A - Pump - Google Patents

Pump

Info

Publication number
JPS52149606A
JPS52149606A JP6660176A JP6660176A JPS52149606A JP S52149606 A JPS52149606 A JP S52149606A JP 6660176 A JP6660176 A JP 6660176A JP 6660176 A JP6660176 A JP 6660176A JP S52149606 A JPS52149606 A JP S52149606A
Authority
JP
Japan
Prior art keywords
pump
furnish
idea
easy assembly
disassembly work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6660176A
Other languages
Japanese (ja)
Inventor
Shunichi Nishimura
Kenzo Mikata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6660176A priority Critical patent/JPS52149606A/en
Publication of JPS52149606A publication Critical patent/JPS52149606A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The idea is to furnish a pump of easy assembly and disassembly work.
COPYRIGHT: (C)1977,JPO&Japio
JP6660176A 1976-06-09 1976-06-09 Pump Pending JPS52149606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6660176A JPS52149606A (en) 1976-06-09 1976-06-09 Pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6660176A JPS52149606A (en) 1976-06-09 1976-06-09 Pump

Publications (1)

Publication Number Publication Date
JPS52149606A true JPS52149606A (en) 1977-12-12

Family

ID=13320591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6660176A Pending JPS52149606A (en) 1976-06-09 1976-06-09 Pump

Country Status (1)

Country Link
JP (1) JPS52149606A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5960555A (en) * 1996-07-24 1999-10-05 Applied Materials, Inc. Method and apparatus for purging the back side of a substrate during chemical vapor processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5960555A (en) * 1996-07-24 1999-10-05 Applied Materials, Inc. Method and apparatus for purging the back side of a substrate during chemical vapor processing

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