JPS52147578A - Process and apparatus for forming continuously patterned coating film of pattern - Google Patents

Process and apparatus for forming continuously patterned coating film of pattern

Info

Publication number
JPS52147578A
JPS52147578A JP6474676A JP6474676A JPS52147578A JP S52147578 A JPS52147578 A JP S52147578A JP 6474676 A JP6474676 A JP 6474676A JP 6474676 A JP6474676 A JP 6474676A JP S52147578 A JPS52147578 A JP S52147578A
Authority
JP
Japan
Prior art keywords
pattern
coating film
patterned coating
forming continuously
continuously patterned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6474676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5527147B2 (enExample
Inventor
Kenzou Souno
Kenichi Asada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP6474676A priority Critical patent/JPS52147578A/ja
Publication of JPS52147578A publication Critical patent/JPS52147578A/ja
Publication of JPS5527147B2 publication Critical patent/JPS5527147B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP6474676A 1976-06-02 1976-06-02 Process and apparatus for forming continuously patterned coating film of pattern Granted JPS52147578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6474676A JPS52147578A (en) 1976-06-02 1976-06-02 Process and apparatus for forming continuously patterned coating film of pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6474676A JPS52147578A (en) 1976-06-02 1976-06-02 Process and apparatus for forming continuously patterned coating film of pattern

Publications (2)

Publication Number Publication Date
JPS52147578A true JPS52147578A (en) 1977-12-08
JPS5527147B2 JPS5527147B2 (enExample) 1980-07-18

Family

ID=13267019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6474676A Granted JPS52147578A (en) 1976-06-02 1976-06-02 Process and apparatus for forming continuously patterned coating film of pattern

Country Status (1)

Country Link
JP (1) JPS52147578A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528316A (en) * 1978-08-17 1980-02-28 Tdk Corp Ion plating apparatus
JP2013213285A (ja) * 2008-09-19 2013-10-17 Ulvac Japan Ltd 基板への膜の形成装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013096951A1 (en) * 2011-12-23 2013-06-27 Solexel, Inc. High productivity spray processing for semiconductor metallization and interconnects

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528316A (en) * 1978-08-17 1980-02-28 Tdk Corp Ion plating apparatus
JP2013213285A (ja) * 2008-09-19 2013-10-17 Ulvac Japan Ltd 基板への膜の形成装置

Also Published As

Publication number Publication date
JPS5527147B2 (enExample) 1980-07-18

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