JPS52146963U - - Google Patents

Info

Publication number
JPS52146963U
JPS52146963U JP5579076U JP5579076U JPS52146963U JP S52146963 U JPS52146963 U JP S52146963U JP 5579076 U JP5579076 U JP 5579076U JP 5579076 U JP5579076 U JP 5579076U JP S52146963 U JPS52146963 U JP S52146963U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5579076U
Other languages
Japanese (ja)
Other versions
JPS5630130Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976055790U priority Critical patent/JPS5630130Y2/ja
Publication of JPS52146963U publication Critical patent/JPS52146963U/ja
Application granted granted Critical
Publication of JPS5630130Y2 publication Critical patent/JPS5630130Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1976055790U 1976-04-30 1976-04-30 Expired JPS5630130Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976055790U JPS5630130Y2 (cg-RX-API-DMAC7.html) 1976-04-30 1976-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976055790U JPS5630130Y2 (cg-RX-API-DMAC7.html) 1976-04-30 1976-04-30

Publications (2)

Publication Number Publication Date
JPS52146963U true JPS52146963U (cg-RX-API-DMAC7.html) 1977-11-08
JPS5630130Y2 JPS5630130Y2 (cg-RX-API-DMAC7.html) 1981-07-17

Family

ID=28514771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976055790U Expired JPS5630130Y2 (cg-RX-API-DMAC7.html) 1976-04-30 1976-04-30

Country Status (1)

Country Link
JP (1) JPS5630130Y2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023001480A1 (en) * 2021-07-22 2023-01-26 Asml Netherlands B.V. System and apparatus for stabilizing electron sources in charged particle systems

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5046477A (cg-RX-API-DMAC7.html) * 1973-08-31 1975-04-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5046477A (cg-RX-API-DMAC7.html) * 1973-08-31 1975-04-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023001480A1 (en) * 2021-07-22 2023-01-26 Asml Netherlands B.V. System and apparatus for stabilizing electron sources in charged particle systems

Also Published As

Publication number Publication date
JPS5630130Y2 (cg-RX-API-DMAC7.html) 1981-07-17

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