JPS52145773U - - Google Patents
Info
- Publication number
- JPS52145773U JPS52145773U JP5217076U JP5217076U JPS52145773U JP S52145773 U JPS52145773 U JP S52145773U JP 5217076 U JP5217076 U JP 5217076U JP 5217076 U JP5217076 U JP 5217076U JP S52145773 U JPS52145773 U JP S52145773U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976052170U JPS5638765Y2 (de) | 1976-04-27 | 1976-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976052170U JPS5638765Y2 (de) | 1976-04-27 | 1976-04-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52145773U true JPS52145773U (de) | 1977-11-04 |
| JPS5638765Y2 JPS5638765Y2 (de) | 1981-09-10 |
Family
ID=28511252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976052170U Expired JPS5638765Y2 (de) | 1976-04-27 | 1976-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5638765Y2 (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012656U (de) * | 1973-05-30 | 1975-02-08 |
-
1976
- 1976-04-27 JP JP1976052170U patent/JPS5638765Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012656U (de) * | 1973-05-30 | 1975-02-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5638765Y2 (de) | 1981-09-10 |