JPS52145771U - - Google Patents
Info
- Publication number
- JPS52145771U JPS52145771U JP5433376U JP5433376U JPS52145771U JP S52145771 U JPS52145771 U JP S52145771U JP 5433376 U JP5433376 U JP 5433376U JP 5433376 U JP5433376 U JP 5433376U JP S52145771 U JPS52145771 U JP S52145771U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433376U JPS52145771U (hr) | 1976-04-27 | 1976-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433376U JPS52145771U (hr) | 1976-04-27 | 1976-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52145771U true JPS52145771U (hr) | 1977-11-04 |
Family
ID=28513349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5433376U Pending JPS52145771U (hr) | 1976-04-27 | 1976-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52145771U (hr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5457953U (hr) * | 1977-09-29 | 1979-04-21 | ||
| JPS5892729U (ja) * | 1981-12-17 | 1983-06-23 | 山形日本電気株式会社 | 半導体製造装置 |
| JPS60189930A (ja) * | 1984-03-12 | 1985-09-27 | Toshiba Ceramics Co Ltd | ウエハ−保持装置 |
-
1976
- 1976-04-27 JP JP5433376U patent/JPS52145771U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5457953U (hr) * | 1977-09-29 | 1979-04-21 | ||
| JPS5892729U (ja) * | 1981-12-17 | 1983-06-23 | 山形日本電気株式会社 | 半導体製造装置 |
| JPS60189930A (ja) * | 1984-03-12 | 1985-09-27 | Toshiba Ceramics Co Ltd | ウエハ−保持装置 |